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走査型電子線誘起超音波顕微システムの開発と材料内部微細構造非破壊観察への適用
http://hdl.handle.net/10069/24652
http://hdl.handle.net/10069/246520700d8ca-9380-4a67-a47a-f9252065d790
名前 / ファイル | ライセンス | アクション |
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JSMS55_95.pdf (1.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2011-02-17 | |||||
タイトル | ||||||
タイトル | 走査型電子線誘起超音波顕微システムの開発と材料内部微細構造非破壊観察への適用 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Scanning electron-induced acoustic microscopy(SEAM) | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Non-destructive observation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thermal wave | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SEM | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Internal microstructure | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
渋谷, 陽二
× 渋谷, 陽二× 小山, 敦弘× 塩田, 剛 |
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著者別名 | ||||||
姓名 | Shibutani, Yoji | |||||
著者別名 | ||||||
姓名 | Koyama, Atsuhiro | |||||
著者別名 | ||||||
姓名 | Shiota, Takeshi | |||||
その他のタイトル | ||||||
その他のタイトル | Non-Destructive Observations of Internal Microstructures of Materials by Scanning Electron-Induced Acoustic Microscopy | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The scanning electron-induced acoustic microscopy (SEAM) has been developed as a new tool for non-destructive observations of the internal microstructures of materials. It consists of the electric chopper to pulse the high current electron beam and the detector of the longitudinal acoustic waves, being attached to the commercial scanning electron microscopy (SEM). The SEAM gives the best performance for observing the internal defects like the local delamination of the interface in the sub-surface of the semiconductor, because it senses the local difference of thermal properties in the sample. The acoustic waves transmitted from the thermal waves generated near to the surface, in principle, carry the information on such internal defects. In the present paper, the outline of our improvements to the system for getting higher resolution is first stated with emphasis on electric chopper way, sample holder design and image data processing method. Some typical samples of a soldered copper piece, Fe-3%Si and TRIP steels are supplied to ascertain the detectability of the internal microstructures. And then, the effects of the pulsing frequency of the electron beam and the accelerating voltage to the resolution of the electron acoustic images are investigated. The higher resolution can be achieved as the higher pulsing frequency, as suggested by the phenomenological considerations. | |||||
書誌情報 |
材料 en : Journal of the Society of Materials Science, Japan 巻 55, 号 1, p. 95-100, 発行日 2006-01-15 |
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出版者 | ||||||
出版者 | 日本材料学会 | |||||
出版者別言語 | ||||||
The Society of Materials Science, Japan | ||||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05145163 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00096175 | |||||
権利 | ||||||
権利情報 | Copyright (c) 2006 日本材料学会 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
引用 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 材料, 55(1), pp.95-100; 2006 |