Integration of Solenoid-Type 3D Micro-Coils by 3D Photolithography and Electroplating
- Issue Date
- 1998
- Language
- KOR
- Citation
대한전기학회 MEMS 연구회 학술발표회, pp.93 - 99
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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