RPCVD에 의해 증착된 $Si_3N_4/SiO_2/SiON$ 박막들의 MMIC\&OEIC 응용에 관한 연구Study for the application of $Si_3N_4/SiO_2/SiON$ films deposited by RPCVD to MMIC\&OEIC
- Advisors
- 권영세researcher; Kwon, Young-Seresearcher
- Description
- 한국과학기술원 : 전기및전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 114242/325007 / 000953472
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.2, [ iii, 65 p. ]
- Keywords
RPCVD; 광도파로; 화학기상증착; Optical waveguide; MIM capacitor
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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