화학증착법에 의해 제조된 Blanket 및 selective 텅스텐박막의 물성에 관한 연구The study on the properties of blanket and selective tungsten prepered by CVD
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1991
- Identifier
- 61779/325007 / 000865154
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1991.2, [ v, 106 p. ]
- Keywords
Chemical vapor deposition
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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