평면 마그네트론 스퍼터링 시스템에서의 타겟 효율 향상을 위한 연구Enhancement of target utilization in a planar magnetron sputtering system
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2004
- Identifier
- 238324/325007 / 020023291
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ v, 52 p. ]
- Keywords
마그네트론 스퍼터링; MAGNETRON SPUTTERING
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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