AES, RBS 및 XRD 분석을 이용한 Si(111)면에서의 다결정-CrSi2의 성장Formation of Polycrystalline CrSi2 on Si (111) Substrate Studied by Auger Electron Spectroscopy, 2 MeV 4He+ Ion Backscattering Spectroscopy, and X-ray Diffraction
- Publisher
- 한국물리학회
- Issue Date
- 1994-12
- Language
- Korean
- Citation
새물리, v.34, no.6, pp.726 - 731
- ISSN
- 0374-4914
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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