급속열처리와 엑시머 레이저에 의해 형성된 다결정 실리콘 박막에서 열처리 방법에 따른 박막의 특성변화Comparison of the Characteristics of Polycrystalline Silicon Thin Films Between Rapid Thermal Annealing and laser Annealing Methods
- Publisher
- 한국재료학회
- Issue Date
- 1997
- Language
- Korean
- Citation
한국재료학회지, v.7, no.10, pp.908 - 913
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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