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Título: | Friction force microscopy characterization of semiconductor heterostructures |
Autor: | Tamayo de Miguel, Francisco Javier CSIC ORCID; García García, Ricardo CSIC ORCID | Fecha de publicación: | 1996 | Editor: | Elsevier | Citación: | Materials Science & Engineering B: Solid-State Materials for Advanced Technology 42: 122-126 (1996) | Resumen: | Measurement of frictional forces in a scanning force microscopy has been applied to perform compositional characterization of semiconductor heterostructures. Semiconductor interfaces as well as multiquantum wells are resolved with 3 nm of spatial resolution. The chemical sensitivity of this method is studied by imaging a step graded Incursive chiGa1-cursive chiAs sample. Changes of 10% in indium (or gallium) composition are detected. These results point out the potential of friction force microscopy for simultaneous topography and compositional characterization of semiconductor materials. | URI: | http://hdl.handle.net/10261/52521 | DOI: | 10.1016/S0921-5107(96)01692-3 | Identificadores: | doi: 10.1016/S0921-5107(96)01692-3 issn: 0921-5107 |
Aparece en las colecciones: | (IMN-CNM) Artículos |
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