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Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry
journal contribution
posted on 2011-07-19, 10:53 authored by Mauro V. Aguanno, Fereydoun Lakestani, Maurice P. Whelan, Michael J. ConnellyWe describe a heterodyne interferometry system based on a complementary metal-oxide semiconductor digital signal processor (CMOS-DSP) camera that is utilized for full-field optical phase measurement using a carrier-based phase retrieval algorithm, with no need for electro-mechanical scanning. Camera characterization test results support the adoption of a single-pixel approach to perform quasiinstantaneous differential phase measurements, which are immune to mechanical vibrations and thermal drifts. We developed an optical configuration based on a Mach-Zehnder heterodyne interferometer to perform a static test on a mirror surface. The profiles of the mirror surface set at two angular positions, the relative displacements in the range of nanometers, and the corresponding tilt angle were determined.
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Optical Engineering;46/ 9/ pp. 095601-5Publisher
Society of Photo-Optical Instrumentation EngineersNote
peer-reviewedLanguage
EnglishExternal identifier
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