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다마신 구리 무전해 도금에서 MBIS를 이용한 초등각 구리 전착 연구 : Superconformal electroless deposition using MBIS (2-mercapto-5-benzimidazole sulfonic acid) in damascene Cu metallization
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- Authors
- Advisor
- 김재정
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 구리 무전해 도금 ; Cu electroless deposition ; 초등각 전착 ; Superconformal deposition ; MBIS ; MBIS ; PEG-8000 ; PEG-8000 ; 투-스텝 무전해 도금 ; two-step electroless deposition
- Description
- 학위논문(석사) --서울대학교 대학원 :화학생물공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045844
https://hdl.handle.net/10371/13351
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