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유도결합 플라즈마 스퍼터링에 의해 제조된 저온 폴리실리콘 박막의 특성에 관한 연구 : Study on the properties of the low temperature poly-silicon films fabricated by ICP assisted DC magnetron sputtering
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- Authors
- Advisor
- 이정중
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 저온 폴리실리콘 박막 ; ICP ; 유도결합 플라즈마 ; Polycrystalline silicon film ; 라만분광법 ; Raman spectroscopy ; 결정 분율 ; Crystalline fraction
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051062
https://hdl.handle.net/10371/14290
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