SEM characterization of nanodevices and nanomaterials

Drouin, D; Pauc, N; Phillips, M; Poissant, P; Delample, V; Souifi, A; Aimez, V; Beauvais, J

SEM characterization of nanodevices and nanomaterials

Drouin, D Pauc, N Phillips, M

Poissant, P Delample, V Souifi, A Aimez, V Beauvais, J

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Publication Type:: Conference Proceeding
Citation:: Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN, 2006, pp. 596 - 599
Issue Date:: 2006-12-01

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Field	Value	Language
dc.contributor.author	Drouin, D	en_US
dc.contributor.author	Pauc, N	en_US
dc.contributor.author	Phillips, M https://orcid.org/0000-0003-1522-9281	en_US
dc.contributor.author	Poissant, P	en_US
dc.contributor.author	Delample, V	en_US
dc.contributor.author	Souifi, A	en_US
dc.contributor.author	Aimez, V	en_US
dc.contributor.author	Beauvais, J	en_US
dc.date.issued	2006-12-01	en_US
dc.identifier.citation	Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN, 2006, pp. 596 - 599	en_US
dc.identifier.isbn	1424404533	en_US
dc.identifier.isbn	9781424404537	en_US
dc.identifier.uri	http://hdl.handle.net/10453/10686
dc.description.abstract	The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in nanoelectronic and photonic applications. Several different techniques make use of this versatile tool. These include voltage contrast in secondary electron imaging, charge collection for semiconductor samples and cathodoluminescence. These techniques are important in device nanofabrication process development and nanomaterials characterization. © 2006 IEEE.	en_US
dc.relation	http://purl.org/au-research/grants/arc/LE0560850
dc.relation.ispartof	Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN	en_US
dc.relation.isbasedon	10.1109/ICONN.2006.340688	en_US
dc.title	SEM characterization of nanodevices and nanomaterials	en_US
dc.type	Conference Proceeding
utslib.for	1007 Nanotechnology	en_US
dc.location.activity	Brisbane QLD Australia	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - CCET - Centre for Clean Energy Technology
utslib.copyright.status	closed_access
pubs.publication-status	Published	en_US

Abstract:

The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in nanoelectronic and photonic applications. Several different techniques make use of this versatile tool. These include voltage contrast in secondary electron imaging, charge collection for semiconductor samples and cathodoluminescence. These techniques are important in device nanofabrication process development and nanomaterials characterization. © 2006 IEEE.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/10686