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SEAS - Chemical and Biological Engineering
Mark T. Swihart, PhD (public)
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SEAS - Chemical and Biological Engineering
Mark T. Swihart, PhD (public)
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Numerical modeling of gas-phase nucleation and particle growth during chemical vapor deposition of silicon
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Date
2000
Author
Girshick, S.L.
Swihart, M.T.
Suh, S.M.
Mahajan, M.R.
Nijhawan, S.
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URI
http://hdl.handle.net/10477/41337
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Mark T. Swihart, PhD (public)
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