A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators

Type
Article

Authors
Leung, Roger
Cheung, Howard
Gang, Hong
Ye, Wenjing

KAUST Grant Number
SA-C0040
UK-C0016

Online Publication Date
2010-03-31

Print Publication Date
2010-10

Date
2010-03-31

Abstract
Squeeze-film damping on microresonators is a significant damping source even when the surrounding gas is highly rarefied. This article presents a general modeling approach based on Monte Carlo (MC) simulations for the prediction of squeeze-film damping on resonators in the freemolecule regime. The generality of the approach is demonstrated in its capability of simulating resonators of any shape and with any accommodation coefficient. The approach is validated using both the analytical results of the free-space damping and the experimental data of the squeeze-film damping on a clamped-clamped plate resonator oscillating at its first flexure mode. The effect of oscillation modes on the quality factor of the resonator has also been studied and semi-analytical approximate models for the squeeze-film damping with diffuse collisions have been developed.

Citation
Leung R, Cheung H, Gang H, Ye W (2010) A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators. Microfluid Nanofluid 9: 809–818. Available: http://dx.doi.org/10.1007/s10404-010-0597-0.

Acknowledgements
This publication is based on work supported in part by Award No. SA-C0040/UK-C0016, made by King Abdullah University of Science and Technology (KAUST), and in part by Hong Kong Research Grants Council under Competitive Earmarked Research Grant 621408.

Publisher
Springer Nature

Journal
Microfluidics and Nanofluidics

DOI
10.1007/s10404-010-0597-0

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