Počet záznamů: 1
Catalysts for ozone sensitivity enhancement of thin sensors
- 1.0134476 - FZU-D 20030376 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Fryček, R. - Myslík, V. - Vrňata, M. - Jelínek, Miroslav
Catalysts for ozone sensitivity enhancement of thin sensors.
Electronic Devices and Systems 03 - Proceedings. Brno: VUT, Brno, 2003 - (Musil, V.), s. 336-339. ISBN 80-214-2452-4.
[Electronic Devices Systems Conference 2003 /10./. Brno (CZ), 09.09.2003-10.09.2003]
Grant CEP: GA ČR GA106/00/P011; GA ČR GA104/03/0406
Grant ostatní: GA ČR(CZ) GP106/01/P089
Výzkumný záměr: CEZ:AV0Z1010914
Klíčová slova: pulsed laser deposition * thin film * gas sensors, catalyst
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Inorganic(In2O3) and organic (InAcAc) thin films were created by pulsed laser deposition on special alumina chips by KrF excimer laser.Influence of addition catalyst was studied. Catalysts Ni, Fe and Zr were deposited by sputtering in sequence. After each step sensitivity and dynamic behavior were measured.
Trvalý link: http://hdl.handle.net/11104/0032377
Počet záznamů: 1