Sem study of morphology of hard carbon films prepared by microwave plasma chemical vapor deposition

0178037 - UFM-A 20033055 RIV HR eng C - Konferenční příspěvek (zahraniční konf.)
Buršík, Jiří - Frgala, Z. - Kudrle, V.
Sem study of morphology of hard carbon films prepared by microwave plasma chemical vapor deposition.
Multinational Congress on Microscopy /6./. Zagreb: Croatian Society for Electron Microscopy, 2003, s. 515.
[Multinational Congress on Microscopy /6./. Pula (HR), 01.06.2003-05.06.2003]
Grant CEP: GA AV ČR IBS2041105; GA ČR GP202/01/P106
Výzkumný záměr: CEZ:AV0Z2041904
Klíčová slova: SEM * CVD * diamond
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

Diamond films studied in this work were grown by microwave plasma chemical vapor deposition (MPCVD) on (i) Si substrates and (ii) WC-Co cutting tools. The paper demostrates a diversity of the surface morphology which is controlled by both substrate pre-treatment and experimental settings of coating process.
Trvalý link: http://hdl.handle.net/11104/0074933