Dimension measurement in a cathode lens equipped low-energy SEM

0205239 - UPT-D 20000015 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Hutař, Otakar - Oral, Martin - Müllerová, Ilona - Frank, Luděk
Dimension measurement in a cathode lens equipped low-energy SEM.
Proceedings of the 12th European Congress on Electron Microscopy. Brno: Czechoslovak Society for Electron Microscopy, 2000 - (Frank, L.; Čiampor, F.), s. I199-I200. ISBN 80-238-5503-4.
[EUREM /12./ - European Congress on Electron Microscopy. Brno (CZ), 09.07.2000-14.07.2000]
Grant CEP: GA AV ČR IBS2065017
Výzkumný záměr: CEZ:AV0Z2065902
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

The paper deals with calibration of magnification in a cathode lens equipped SEM, which provides a high resolution in the energy range below 2000 eV, where both the charging-up and edge effect phenomena, complicating the measurement of dimensions, are suppressed. An analytical expression for the image magnification, in the dependence on the electron impact energy and the working distance, is derived and verified with respect to the measured values. Finally, a procedure suitable for the routine calibration is proposed.
Trvalý link: http://hdl.handle.net/11104/0100857