Frequency Noise Properties of Lasers for Interferometry in Nanometrology

0389837 - ÚPT 2014 RIV CH eng J - Článek v odborném periodiku
Hrabina, Jan - Lazar, Josef - Holá, Miroslava - Číp, Ondřej
Frequency Noise Properties of Lasers for Interferometry in Nanometrology.
Sensors. Roč. 13, č. 2 (2013), s. 2206-2219. E-ISSN 1424-8220
Grant CEP: GA ČR GPP102/11/P820; GA ČR GA102/09/1276; GA AV ČR KAN311610701; GA MŠMT ED0017/01/01; GA MŠMT(CZ) LC06007
Institucionální podpora: RVO:68081731
Klíčová slova: nanometrology * laser noise * interferometry * nanopositioning * AFM
Kód oboru RIV: BH - Optika, masery a lasery
Impakt faktor: 2.048, rok: 2013

In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air.
Trvalý link: http://hdl.handle.net/11104/0218775