Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H.sub.2./sub./CH.sub.4./sub./CO.sub.2./sub./N.sub.2./sub. gas chemistry

0424202 - FZÚ 2014 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Vojs, M. - Varga, Marián - Babchenko, Oleg - Ižák, Tibor - Mikolášek, M. - Marton, M. - Kromka, Alexander
Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H₂/CH₄/CO₂/N₂ gas chemistry.
Proceedings of 8th Solid State Surfaces and Interfaces. Bratislava: Comenius University, 2013 - (Brunner, R.), s. 187. ISBN 978-80-223-3501-0.
[Solid State Surfaces and Interfaces /8./. Smolenice (SK), 25.11.2013-28.11.2013]
Grant CEP: GA ČR(CZ) GBP108/12/G108
Institucionální podpora: RVO:68378271
Klíčová slova: diamond films * nitrogen doping * plasma chemistry
Kód oboru RIV: JJ - Ostatní materiály

In this contribution we focused on the detailed study of diamond films grown by pulsed linear antenna microwave plasma chemical vapour deposition from the N2/H2/CH4/CO2 process gas mixture at different concentrations. The changes observed in the plasma chemistry and growth kinetics were discussed.
Trvalý link: http://hdl.handle.net/11104/0230212