Industrial interferometry systems for multi-axis measurement

0446944 - ÚPT 2016 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Oulehla, Jindřich - Holá, Miroslava - Hrabina, Jan - Lazar, Josef - Číp, Ondřej - Vychodil, M. - Sedlář, P. - Provazník, M.
Industrial interferometry systems for multi-axis measurement.
Optical Measurement Systems for Industrial Inspection IX (Proceedings of SPIE 9525). Bellingham: SPIE, 2015, 95254M:1-5. ISBN 9781628416855. ISSN 0277-786X.
[Optical Measurement Systems for Industrial Inspection /9./. Munich (DE), 22.06.2015-25.06.2015]
Grant CEP: GA TA ČR TA02010711; GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01; GA ČR(CZ) GA15-18430S
Institucionální podpora: RVO:68081731
Klíčová slova: interferometry * highly-coherent lasers * signal processing
Kód oboru RIV: BH - Optika, masery a lasery

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (IS I) of the Academy of Sciences of the Czech Republic and a company Meopta - optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta optika Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta optika contributes with development of new technology for processing and polishing of high-precision flat-surface optical components.
Trvalý link: http://hdl.handle.net/11104/0248891