New observations on DUV radiation at 257 nm and 206 nm produced by a picosecond diode pumped thin-disk laser

0508308 - FZÚ 2020 RIV US eng J - Článek v odborném periodiku
Turčičová, Hana - Novák, Ondřej - Roškot, Lukáš - Smrž, Martin - Mužík, Jiří - Chyla, Michal - Endo, Akira - Mocek, Tomáš
New observations on DUV radiation at 257 nm and 206 nm produced by a picosecond diode pumped thin-disk laser.
Optics Express. Roč. 27, č. 17 (2019), s. 24286-24299. ISSN 1094-4087
Grant CEP: GA MŠMT EF15_006/0000674; GA MŠMT LO1602; GA MŠMT LM2015086
GRANT EU: European Commission(XE) 739573 - HiLASE CoE
Grant ostatní: OP VVV - HiLASE-CoE(XE) CZ.02.1.01/0.0/0.0/15_006/0000674
Institucionální podpora: RVO:68378271
Klíčová slova: DUV radiation * picosecond diode * thin-disk laser * DUV photolithography
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 3.669, rok: 2019
Způsob publikování: Omezený přístup
https://doi.org/10.1364/oe.27.024286

We report new observations on picosecond deep ultraviolet coherent beams generated in a CLBO as the fourth and fifth harmonics of a diode pumped high average power Yb:YAG thin disk laser operating at 77 kHz repetition rate at 1030 nm. The effects of the two-photon absorption were observed, e.g. the modification of phase matching conditions, lowering of the conversion efficiency. The fifth harmonic generation (4!+1!) was studied for different time delays between both pump beams and for the case of excess input power of the fundamental. The latter effect suggests a possibility of increasing DUV output at short crystals. The highest output power obtained at 257 nm was 7.6 W and 1 W at 206 nm. To our knowledge these DUV output powers rank among the highest for picosecond pulses at the repetition rate of the order of magnitude of 100 kHz.
Trvalý link: http://hdl.handle.net/11104/0299255