Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

0555695 - ÚFP 2022 RIV CH eng J - Článek v odborném periodiku
Arezki, Y. - Su, R. - Heikkinen, V. - Leprete, F. - Psota, Pavel - Bitou, Y. - Schober, C. - Mehdi-Souzani, C. - Alzahrani, B. A. M. - Zhang, X. - Kondo, Y. - Prüss, J. - Lédl, Vít - Anwer, N. - Bouazizi, M. L. - Leach, R. - Nouira, H.
Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level.
Sensors. Roč. 21, č. 4 (2021), s. 1-19, č. článku 1103. E-ISSN 1424-8220
Institucionální podpora: RVO:61389021
Klíčová slova: Aspheric and freeform optical elements * Dimensional metrology * Measured data evaluation * Robust reference minimum zone (Hybrid Trust Region) fitting * Ultra-high precision measuring machine * Uncertainty
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 3.847, rok: 2021
Způsob publikování: Open access
https://www.mdpi.com/1424-8220/21/4/1103

The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
Trvalý link: http://hdl.handle.net/11104/0330159