Title
A multiscale simulator for low pressure chemical vapor deposition
Related to
Institute for Mathematics and Its Applications>IMA Preprints Series
Suggested Citation
Gobbert, M.K.; Merchant, T.P.; Borucki, Leonard; Cale, T.S..
(1997).
A multiscale simulator for low pressure chemical vapor deposition.
Retrieved from the University of Minnesota Digital Conservancy,
https://hdl.handle.net/11299/3055.