Title
An analysis of the chemical-mechanical polishing process
Related to
Institute for Mathematics and Its Applications>IMA Preprints Series
Suggested Citation
Borucki, Leonard; Connell, Cameron; Jadallah, Hala; Li, Jianbo; Park, Peter J.; Petracovici, Boris; Zeigler, David.
(1998).
An analysis of the chemical-mechanical polishing process.
Retrieved from the University of Minnesota Digital Conservancy,
https://hdl.handle.net/11299/3248.