In this work a systematic comparison of total reflection X-ray fluorescence (TXRF), synchrotron radiation-TXRF (SR-TXRF), time of flight secondary ion mass spectroscopy, lifetime, and deep level transient spectroscopy data of iron concentration is carried out. SR-TXRF is considered as a reference for the other techniques. Reasonably good correlations are obtained, though, as expected, SR-TXRF exhibits the maximum sensitivity among surface techniques. Among lifetime measurements, the electrolytic metal analysis tool (ELYMAT) technique shows the best sensitivity at very low concentrations. A method is developed to elaborate ELYMAT data in order to quantify iron concentration when more contaminants are simultaneously present
Quantitative Evaluation of Iron at the Silicon Surface after Wet Cleaning Treatments
Lazzeri, Paolo;Bersani, Massimo;Vanzetti, Lia Emanuela;
2004-01-01
Abstract
In this work a systematic comparison of total reflection X-ray fluorescence (TXRF), synchrotron radiation-TXRF (SR-TXRF), time of flight secondary ion mass spectroscopy, lifetime, and deep level transient spectroscopy data of iron concentration is carried out. SR-TXRF is considered as a reference for the other techniques. Reasonably good correlations are obtained, though, as expected, SR-TXRF exhibits the maximum sensitivity among surface techniques. Among lifetime measurements, the electrolytic metal analysis tool (ELYMAT) technique shows the best sensitivity at very low concentrations. A method is developed to elaborate ELYMAT data in order to quantify iron concentration when more contaminants are simultaneously presentI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
