This paper presents the design methodology for the micromachined circuits operating in the microwave and mm-wave frequency region. The design is based on dividing the circuit into membrane-supported components, bulk components and membrane to bulk transitions. Every region is modeled using appropriate and techniques using full-wave electromagnetic simulation software. As illustrative examples, the design of band-pass filter structures and double-folded slot antenna arrays are briefly described. The simulation results are compared with experimental data

Computer-Aided Design for Membrane Supported mm-Wave Circuits

Giacomozzi, Flavio;
2003-01-01

Abstract

This paper presents the design methodology for the micromachined circuits operating in the microwave and mm-wave frequency region. The design is based on dividing the circuit into membrane-supported components, bulk components and membrane to bulk transitions. Every region is modeled using appropriate and techniques using full-wave electromagnetic simulation software. As illustrative examples, the design of band-pass filter structures and double-folded slot antenna arrays are briefly described. The simulation results are compared with experimental data
2003
9789732709795
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11582/597
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