Optical emission spectroscopy and modeling of plasma produced by excimer laser ablation of titanium oxides

In the present study, the time evolution of electron number density, of electron, atom and ion temperatures, of plasma produced by KrF excimer laser ablation of titanium dioxide and monoxide targets, are investigated by temporally and spatially resolved optical emission spectroscopy over a wide range of laser fluence from 1.7 to 6 J cm-2, oxygen pressures of 10-2-10-1 torr and in a vacuum. A state-to-state collisional radiative model is proposed for the first time to interpret the experimental results at a distance of 0.6 mm from the target surface, in vacuum and for a time delay from 100 to 300 ns from the beginning of the laser pulse. In particular, we concentrate our attention on problems concerning the existence of the local thermodynamic conditions in the laser-induced plasma and deviation from them, as observed in our experiment. The numerical model proposed for calculating the electron number density and the population densities of atoms and ions in excited states give good quantitative agreement with the experimental results of the optical emission spectroscopy measurements.