Measuring electro-mechanical properties of thin films on polymer substrates

Cordill, Megan Jo; Glushko, Oleksandr; Kreith, Josef; Marx, Vera Maria; Kirchlechner, Christoph

doi:10.1016/j.mee.2014.08.002

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Measuring electro-mechanical properties of thin films on polymer substrates

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Marx, Vera Maria
Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Kirchlechner, Christoph
Nano-/ Micromechanics of Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Cordill, M. J., Glushko, O., Kreith, J., Marx, V. M., & Kirchlechner, C. (2015). Measuring electro-mechanical properties of thin films on polymer substrates. Microelectronic Engineering, 137(1), 96-100. doi:10.1016/j.mee.2014.08.002.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0023-C731-3

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