Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/3778
Título: | Silver-based reflective coatings for micromachined optical filters |
Autor(es): | Correia, J. H. Bartek, M. Wolffenbuttel, R. F. |
Palavras-chave: | Optical filters Silver coating |
Data: | Set-1999 |
Editora: | IOP Publishing |
Revista: | Journal of micromechanics and microengineering |
Citação: | "Journal of micromechanics and microengineering". ISSN 0960-1317. 9:2 (June 1999) 162-165. |
Resumo(s): | Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, each with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry–P´erot optical filter. Investigation of the silver-based reflective coatings, and mirror characterization, including influence of bulk micromachining, are presented |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/3778 |
ISSN: | 0960-1317 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | DEI - Artigos em revistas internacionais |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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artigo5.pdf | documento principal | 422,15 kB | Adobe PDF | Ver/Abrir |