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https://hdl.handle.net/1822/4384| Título: | Modelling and characterization of a low pressure capacitively coupled hydrogen discharge |
| Autor(es): | Marques, L. Jolly, J. Gousset, G. Alves, L. L. |
| Data: | Set-2004 |
| Editora: | European Physical Society |
| Citação: | CIUPINA, Victor ; MUSA, Geavit ; VLADOIU, Rodica, ed. lit. – “ESCAMPIG : proceedings of the European Conference on Atomic and Molecular Physics of Ionised Gases, 17, Constanta, Roménia, 2004”. [S.l.] : European Physical Society, 2004, p. 113. |
| Resumo(s): | This paper presents a systematic characterization of a pure hydrogen capacitively coupled radio frequency discharge, produced in a parallel plate cylindrical setup, comparing experimental measurements obtained for such discharge with numerical simulations. A good agreement is found between simulation results and experimental measurements for the discharge main electrical parameters. A comparison of H atom absolute density LIF measurements with simulation results will also be presented. |
| Tipo: | Artigo |
| URI: | https://hdl.handle.net/1822/4384 |
| Arbitragem científica: | yes |
| Acesso: | Acesso aberto |
| Aparece nas coleções: | CDF - FCT - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
| Ficheiro | Descrição | Tamanho | Formato | |
|---|---|---|---|---|
| escampig 2004.pdf | 107,16 kB | Adobe PDF | Ver/Abrir |
