Title:
Fabrication and modeling of electrostatic actuators for high frequency applications

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Author(s)
Chinthakindi, Anil Kumar
Authors
Advisor(s)
Kohl, Paul A.
Allen, Sue Ann Bidstrup
Advisor(s)
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Series
Supplementary to
Abstract
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Date Issued
2001-05
Extent
243 bytes
Resource Type
Text
Resource Subtype
Thesis
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