Title:
NIRT: Electron beam chemical vapor deposition (CVD) - a new tool for manufacturing nanomaterials and devices
NIRT: Electron beam chemical vapor deposition (CVD) - a new tool for manufacturing nanomaterials and devices
Author(s)
Lackey, W. Jack
Wang, Zhong
Fedorov, Andrei G.
Orlando, Thomas M.
Wang, Zhong
Fedorov, Andrei G.
Orlando, Thomas M.
Advisor(s)
Editor(s)
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Abstract
Sponsor
National Science Foundation (U.S.)
Date Issued
2011-09-22
Extent
Resource Type
Text
Resource Subtype
Technical Report