Title:
Pitch/Roll Annulus Gyroscope with Slanted Quadrature Tuning Electrodes and Related Fabrication Methods
Pitch/Roll Annulus Gyroscope with Slanted Quadrature Tuning Electrodes and Related Fabrication Methods
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Abstract
A bulk acoustic wave resonator apparatus includes a resonator member having an annulus shape, and at least one anchor structure coupling the resonator member to a substrate. A perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle relative to a plane defined by a surface of the resonator member. The surface of the resonator member may be defined by a (100) crystal plane, and the angle of the respective sidewalls may be defined by a (111) crystal plane. Related fabrication methods are also discussed.
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Date Issued
2/16/2021