Discharge kinetics of inductively coupled oxygen plasmas: experiment and model
-
Altmetric Citations
Corr, Cormac; Gomez, S.; Graham, W G
Description
In this paper, neutral and charged particle dynamics in both the capacitive and inductive modes of an inductively coupled oxygen discharge are presented. Langmuir probes, laser-assisted photodetachment and two-photon laser-induced fluorescence are employed to measure plasma parameters in the 13.56MHz system for a range of plasma powers and gas pressures. It is found that the capacitive mode is more electronegative with lower molecular dissociation compared with the inductive mode. However, the...[Show more]
Collections | ANU Research Publications |
---|---|
Date published: | 2012 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/32883 |
Source: | Plasma Sources Science and Technology |
DOI: | 10.1088/0963-0252/21/5/055024 |
Download
File | Description | Size | Format | Image |
---|---|---|---|---|
01_Corr_Discharge_kinetics_of_2012.pdf | 329.91 kB | Adobe PDF | Request a copy |
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.
Updated: 17 November 2022/ Responsible Officer: University Librarian/ Page Contact: Library Systems & Web Coordinator