Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals

Kicken, H H J E; Alkemade, P.F.A.; van der Heijden, Rob W.; Karouta, Fouad; Nötzel, Richard; van der Drift, E.; Salemink, H W M

doi:10.1109/ICIPRM.2009.5012419

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Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals

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Kicken, H H J E; Alkemade, P.F.A.; van der Heijden, Rob W.; Karouta, Fouad; Nötzel, Richard; van der Drift, E.; Salemink, H W M

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Local post-production processing of single holes in a planar photonic crystal is demonstrated by selectively opening a masking layer by focused ion beam milling. Local tuning was optically demonstrated by both blueshifting and subsequent red-shifting the

Collections	ANU Research Publications
Date published:	2009
Type:	Conference paper
URI:	http://hdl.handle.net/1885/71795
Source:	Conference Proceedings - International Conference on Indium Phosphide and Related Materials
DOI:	10.1109/ICIPRM.2009.5012419

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Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals

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