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http://hdl.handle.net/1903/3156
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| Title: | MULTIPLEXED CHEMICAL SENSING AND THIN FILM METROLOGY IN PROGRAMMABLE CVD PROCESS. |
| Authors: | Cai, Yuhong |
| Advisors: | Rubloff, Gary W. |
| Department/Program: | Material Science and Engineering |
| Type: | Dissertation |
| Sponsors: | Digital Repository at the University of Maryland
University of Maryland (College Park, Md.) |
| Keywords: | Engineering, Materials Science (0794)
Mass spectrometry |
| Issue Date: | 2-Dec-2005 |
| Abstract: | Mass spectrometry (mass spec) has proven valuable in understanding and controlling chemical processes used in semiconductor fabrication. Given the complexity of spatial distributions of fluid flow, thermal, and chemical parameters in such processes, multi-point chemical sampling would be beneficial.
This dissertation discusses the design and development a multiplexed mass spec gas sampling system for real-time, in situ measurement of gas species concentrations in a spatially programmable chemical vapor deposition (SP-CVD) reactor prototype, where such chemical sensing is essential to achieve the benefits of a new paradigm for reactor design. The spatially programmable reactor, in which across-wafer distributions of reactant are programmable, enables (1) uniformity at any desired process design point, or (2) intentional nonuniformity to accelerate process optimization through combinatorial methods. The application of multiplexed mass spec sensing is well suited to our SP-CVD design, ... |
| URI: | http://hdl.handle.net/1903/3156 |
| Appears in Collections: | Materials Science & Engineering Theses and Dissertations
UM Theses and Dissertations
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| umi-umd-2977.pdf | | 1539Kb | Adobe PDF | 191 | View/Open |
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