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Abstract:

TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 °C. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 °C were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 °C. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures showed a transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm. © 2006 Elsevier B.V. All rights reserved.

Registro:

Documento: Artículo
Título:Anatase TiO2 films obtained by cathodic arc deposition
Autor:Kleiman, A.; Márquez, A.; Lamas, D.G.
Filiación:Instituto de Física del Plasma (CONICET), Dpto. de Física, Fac. de Ciencias Exactas y Naturales, Cdad. Universitaria Pab. 1, C1428EHA Buenos Aires, Argentina
Centro de Investigaciones en Sólidos, CITEFA- CONICET, J.B. de La Salle 4397, B1603ALO Villa Martelli Provincia BA, Argentina
Palabras clave:Arc evaporation; Atomic force microscopy (AFM); Structure; Titanium oxide; Deposition; Grain size and shape; Phase transitions; Surface morphology; Surface roughness; Thermal effects; Thin films; Arc evaporation; Cathodic arc deposition; Crystalline structure; Titanium dioxide; Deposition; Grain size and shape; Phase transitions; Surface morphology; Surface roughness; Thermal effects; Thin films; Titanium dioxide
Año:2007
Volumen:201
Número:14
Página de inicio:6358
Página de fin:6362
DOI: http://dx.doi.org/10.1016/j.surfcoat.2006.12.002
Título revista:Surface and Coatings Technology
Título revista abreviado:Surf. Coat. Technol.
ISSN:02578972
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02578972_v201_n14_p6358_Kleiman

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Citas:

---------- APA ----------
Kleiman, A., Márquez, A. & Lamas, D.G. (2007) . Anatase TiO2 films obtained by cathodic arc deposition. Surface and Coatings Technology, 201(14), 6358-6362.
http://dx.doi.org/10.1016/j.surfcoat.2006.12.002
---------- CHICAGO ----------
Kleiman, A., Márquez, A., Lamas, D.G. "Anatase TiO2 films obtained by cathodic arc deposition" . Surface and Coatings Technology 201, no. 14 (2007) : 6358-6362.
http://dx.doi.org/10.1016/j.surfcoat.2006.12.002
---------- MLA ----------
Kleiman, A., Márquez, A., Lamas, D.G. "Anatase TiO2 films obtained by cathodic arc deposition" . Surface and Coatings Technology, vol. 201, no. 14, 2007, pp. 6358-6362.
http://dx.doi.org/10.1016/j.surfcoat.2006.12.002
---------- VANCOUVER ----------
Kleiman, A., Márquez, A., Lamas, D.G. Anatase TiO2 films obtained by cathodic arc deposition. Surf. Coat. Technol. 2007;201(14):6358-6362.
http://dx.doi.org/10.1016/j.surfcoat.2006.12.002