Acoustical properties characterization of ...
Type de document :
Communication dans un congrès avec actes
DOI :
Titre :
Acoustical properties characterization of a composite made of SU-8 and nanoparticules for BioMEMS application
Auteur(s) :
Carlier, Julien [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Campistron, Pierre [Auteur]
Debavelaere-Callens, Dorothée [Auteur]
Soyer, Caroline [Auteur]
Nongaillard, Bertrand [Auteur]
Wang, S. [Auteur]
Zhao, X. [Auteur]
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 [IEMN]
Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN [MAMINA - IEMN]
Campistron, Pierre [Auteur]
Debavelaere-Callens, Dorothée [Auteur]
Soyer, Caroline [Auteur]
Nongaillard, Bertrand [Auteur]
Wang, S. [Auteur]
Zhao, X. [Auteur]
Titre de la manifestation scientifique :
Second ASA-EAA Joint Conference, ACOUSTICS'08
Ville :
Paris
Pays :
France
Date de début de la manifestation scientifique :
2008
Éditeur :
_
Date de publication :
2008
Mot(s)-clé(s) en anglais :
Acoustic transducers
Lab-on-a-chip
BioMEMS
Physical quantities
Signal processing
Telecommunications engineering
Composite materials
Dielectric materials
Light sensitive materials
Lab-on-a-chip
BioMEMS
Physical quantities
Signal processing
Telecommunications engineering
Composite materials
Dielectric materials
Light sensitive materials
Discipline(s) HAL :
Sciences de l'ingénieur [physics]
Résumé en anglais : [en]
The photoresist SU‐8 (often used in microtechnology) has been acoustically characterized at the frequency of 1 GHz thanks to ZnO transducers. This material will be used to achieve acoustical matching between silicon and ...
Lire la suite >The photoresist SU‐8 (often used in microtechnology) has been acoustically characterized at the frequency of 1 GHz thanks to ZnO transducers. This material will be used to achieve acoustical matching between silicon and water at this frequency and a gain of about 5 dB has been obtained using the combination of this material with a silicon oxyde layer. The acoustical characterization of a composite material made of this photoresist SU‐8 doped with nanoparticules (TiO2 for example) is also presented. The aim is to achieve matching layers with specific mechanical impedance around 5 MRay and depending on the nanoparticules concentration. The targeted application concerns the integration of high frequency ultrasonic transducer in Lab‐on‐Chip for biological cell characterization, especially adhesion properties or biological cells mechanical behaviour. The mechanical impedance and the attenuation of this composite material are characterized around 1 GHz thanks to a standing wave ratio method measuring S11 parameter and extracting the targeted parameters thanks to signal processing.Lire moins >
Lire la suite >The photoresist SU‐8 (often used in microtechnology) has been acoustically characterized at the frequency of 1 GHz thanks to ZnO transducers. This material will be used to achieve acoustical matching between silicon and water at this frequency and a gain of about 5 dB has been obtained using the combination of this material with a silicon oxyde layer. The acoustical characterization of a composite material made of this photoresist SU‐8 doped with nanoparticules (TiO2 for example) is also presented. The aim is to achieve matching layers with specific mechanical impedance around 5 MRay and depending on the nanoparticules concentration. The targeted application concerns the integration of high frequency ultrasonic transducer in Lab‐on‐Chip for biological cell characterization, especially adhesion properties or biological cells mechanical behaviour. The mechanical impedance and the attenuation of this composite material are characterized around 1 GHz thanks to a standing wave ratio method measuring S11 parameter and extracting the targeted parameters thanks to signal processing.Lire moins >
Langue :
Anglais
Comité de lecture :
Oui
Audience :
Non spécifiée
Vulgarisation :
Non
Source :