Direct measurement of graphene adhesion on silicon surface by intercalation of nanoparticles

Permanent URL: http://hdl.handle.net/2047/d20000965
Title:
Direct measurement of graphene adhesion on silicon surface by intercalation of nanoparticles
Creator:
Zong, Zong (Author)
Chen, Chia-Ling (Author)
Dokmeci, Mehmet R. (Author)
Wan, Kai-tak (Author)
Publisher:
American Institute of Physics
Copyright date:
2010
Type of resource:
Text
Genre:
Articles
Format:
electronic
Digital origin:
born digital
Abstract/Description:
We report a technique to characterize adhesion of monolayered/multilayered graphene sheets on silicon wafer. Nanoparticles trapped at graphene-silicon interface act as point wedges to support axisymmetric blisters. Local adhesion strength is found by measuring the particle height and blister radius using a scanning electron microscope. Adhesion energy of the typical graphene-silicon interface is measured to be 151±28 mJ/m2. The proposed method and our measurements provide insights in fabrication and reliability of microelectromechanical/nanoelectromechanical systems.
Comments:
Originally published in Journal of Applied Physics v.107 no.2 (2010), p.026104. doi:10.1063/1.3294960
Subjects and keywords:
Integrated circuits - Wafer-scale integration
Graphene
Nanoparticles
adhesion
elemental semiconductors
graphene
multilayers
nanoparticles
scanning electron microscopy
silicon
Electronic Devices and Semiconductor Manufacturing
Nanoscience and Nanotechnology
Permanent URL:
http://hdl.handle.net/2047/d20000965

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