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Automatic visual inspection system for microelectronicsA system for automatically inspecting an integrated circuit was developed. A device for shining a scanning narrow light beam at an integrated circuit to be inspected and another light beam at an accepted integrated circuit was included. A pair of photodetectors that receive light reflected from these integrated circuits, and a comparing system compares the outputs of the photodetectors.
Document ID
19780009453
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Micka, E. Z. (JPL)
Date Acquired
September 3, 2013
Publication Date
September 30, 1975
Subject Category
Quality Assurance And Reliability
Accession Number
78N17396
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-NPO-13282|US-PATENT-3,909,602
Patent Application
US-PATENT-APPL-SN-401224

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