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Semiconductor technology program. Progress briefsMeasurement technology for semiconductor materials, process control, and devices is reviewed. Activities include: optical linewidth and thermal resistance measurements; device modeling; dopant density profiles; resonance ionization spectroscopy; and deep level measurements. Standardized oxide charge terminology is also described.
Document ID
19810016786
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Bullis, W. M.
(National Bureau of Standards Washington, DC, United States)
Date Acquired
September 4, 2013
Publication Date
October 1, 1980
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
PB81-154106
NASA-CR-164383
NBSIR-80-2006-3
Accession Number
81N25322
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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