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Pyroelectric detector arraysA pryoelectric detector array and the method for making it are described. A series of holes formed through a silicon dioxide layer on the surface of a silicon substrate forms the mounting fixture for the pyroelectric detector array. A series of nontouching strips of indium are formed around the holes to make contact with the backside electrodes and form the output terminals for individual detectors. A pyroelectric detector strip with front and back electrodes, respectively, is mounted over the strip. Biasing resistors are formed on the surface of the silicon dioxide layer and connected to the strips. A metallized pad formed on the surface of the layer is connected to each of the biasing resistors and to the film to provide the ground for the pyroelectric detector array.
Document ID
19820023783
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Fripp, A. L. (NASA Langley Research Center Hampton, VA, United States)
Robertson, J. B. (NASA Langley Research Center Hampton, VA, United States)
Breckenridge, R. A. (NASA Langley Research Center Hampton, VA, United States)
Date Acquired
September 4, 2013
Publication Date
July 27, 1982
Subject Category
Instrumentation And Photography
Accession Number
82N31659
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-LAR-12363-1|US-PATENT-4,341,012
Patent Application
US-PATENT-APPL-SN-191748

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