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Material growth and characterization for solid state devicesManganese was used as the dopant for p-type InGaAs layers grown on semi-insulating (Fe-doped) and n-type (Sn-doped) InP substrates. Optical, electrical (Hall) and SIMS measurements were used to characterize the layers. Mn-diffusion into the substrate (during the growth of In GaAs) was observed only when Fe-doped substrates were used. Quaternary layers of two compositions corresponding to wavelengths (energy gaps) of approximated 1.52 micrometers were successfully grown at a constant temperature of 640 C and InP was grown in the temperature range of 640 C to 655 C. A study of the effect of pulses on the growth velocity of InP indicated no significant change as long as the average applied current was kept constant. A system for depositing films of Al2O3 by the pyrolysis of aluminum isopropoxide was designed and built. Deposited layers on Si were characterized with an ellipsometer and exhibited indices of refraction between 1.582 and 1.622 for films on the order of 3000 A thick. Undoped and p-type (Mn-doped) InGaAs epitaxial layers were also grown on Fe-doped InP substrates through windows in sputtered SiO2 (3200 A thick) layers.
Document ID
19850011537
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Stefanakos, E. K. (North Carolina Agricultural and Technical State Univ. Greensboro, NC, United States)
Collis, W. J. (North Carolina Agricultural and Technical State Univ. Greensboro, NC, United States)
Abul-Fadl, A. (North Carolina Agricultural and Technical State Univ. Greensboro, NC, United States)
Iyer, S. (North Carolina Agricultural and Technical State Univ. Greensboro, NC, United States)
Date Acquired
September 5, 2013
Publication Date
November 30, 1984
Subject Category
Solid-State Physics
Report/Patent Number
NAS 1.26:174410
NASA-CR-174410
Accession Number
85N19847
Funding Number(s)
CONTRACT_GRANT: NSG-1390
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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