NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Nondestructive SEM for surface and subsurface wafer imagingThe scanning electron microscope (SEM) is considered as a tool for both failure analysis as well as device characterization. A survey is made of various operational SEM modes and their applicability to image processing methods on semiconductor devices.
Document ID
19870017773
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Propst, Roy H.
(North Carolina Univ. Chapel Hill, NC, United States)
Bagnell, C. Robert
(North Carolina Univ. Chapel Hill, NC, United States)
Cole, Edward I., Jr.
(North Carolina Univ. Chapel Hill, NC, United States)
Davies, Brian G.
(North Carolina Univ. Chapel Hill, NC, United States)
Dibianca, Frank A.
(North Carolina Univ. Chapel Hill, NC, United States)
Johnson, Darryl G.
(North Carolina Univ. Chapel Hill, NC, United States)
Oxford, William V.
(North Carolina Univ. Chapel Hill, NC, United States)
Smith, Craig A.
(North Carolina Univ. Chapel Hill, NC, United States)
Date Acquired
September 5, 2013
Publication Date
August 1, 1987
Publication Information
Publication: NASA. Langley Research Center, Electronics Reliability and Measurement Technology
Subject Category
Instrumentation And Photography
Accession Number
87N27206
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
No Preview Available