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Development and applications of optical interferometric micrometrology in the angstrom and subangstrom rangeThe recent development of the scanning electron tunneling microscope and the atomic force microscope requires absolute standards for measurements in the angstrom and subangstrom range. Optical interferometry with lasers and multiple mode laser resonances can provide absolute measurements as the laser wavelengths are very accurately known. A key feature of such measurements is the use of piezoelectric crystals as translators of the highest accuracy for very small disturbances. However, the dimensional changes of these crystals resulting from electrical potential changes depend on many variables, among them the method of mounting, so that accurate calibrations are necessary. Starting from advances in optical metrology made by physicists trying to find gravity waves, advances which led to measurements down to 10 to the -5 A, the author designed and built a much simpler system for the angstrom range. The major limiting factors were mechanical vibrations, air currents, thermal changes and laser instabilities.
Document ID
19880013812
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Lauer, James L. (Rensselaer Polytechnic Inst. Troy, N.Y., United States)
Abel, Phillip B. (NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
September 5, 2013
Publication Date
January 1, 1988
Subject Category
Instrumentation And Photography
Report/Patent Number
NAS 1.15:100299
E-3945
NASA-TM-100299
Accession Number
88N23196
Funding Number(s)
PROJECT: RTOP 505-63-2A
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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