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Silicon Micromachined Sensor for Broadband Vibration AnalysisThe development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.
Document ID
19960054122
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Gutierrez, Adolfo (InterScience, Inc. Troy, NY United States)
Edmans, Daniel (InterScience, Inc. Troy, NY United States)
Cormeau, Chris (InterScience, Inc. Troy, NY United States)
Seidler, Gernot (InterScience, Inc. Troy, NY United States)
Deangelis, Dave (Rensselaer Polytechnic Inst. Troy, NY United States)
Maby, Edward (Rensselaer Polytechnic Inst. Troy, NY United States)
Date Acquired
September 6, 2013
Publication Date
January 1, 1995
Subject Category
Instrumentation And Photography
Accession Number
96N36368
Funding Number(s)
CONTRACT_GRANT: F29601-94-C-0095
CONTRACT_GRANT: DASG60-94-C-0081
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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