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Synchrotron X-ray Microdiffraction Analysis of Proton Irradiated Polycrystalline Diamond FilmsX-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with sub-micron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechanical Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2x10(exp 17) H(+)per square centimeter protons. Preliminary results indicate that a measurable strain, on the order of 10(exp -3), was introduced into the film near the End of Range (EOR) region of the protons.
Document ID
20040121079
Acquisition Source
Marshall Space Flight Center
Document Type
Preprint (Draft being sent to journal)
Authors
Newton, R. I. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Davidson, J. L. (Vanderbilt Univ. Nashville, TN, United States)
Ice, G. E. (Oak Ridge National Lab. TN, United States)
Liu, W. (Oak Ridge National Lab. TN, United States)
Date Acquired
September 7, 2013
Publication Date
July 26, 2004
Subject Category
Solid-State Physics
Funding Number(s)
CONTRACT_GRANT: DE-AC05-00OR-22725
CONTRACT_GRANT: DE-FG02-91ER-45439
CONTRACT_GRANT: DE-AC05-00OR-22725
CONTRACT_GRANT: W-31-09-eng-38
Distribution Limits
Public
Copyright
Public Use Permitted.

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