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Fabricating a hybrid imaging device having non-destructive sense nodesA hybrid detector or imager includes two substrates fabricated under incompatible processes. An array of detectors, such as charged-coupled devices, are formed on the first substrate using a CCD fabrication process, such as a buried channel or peristaltic process. One or more charge-converting amplifiers are formed on a second substrate using a CMOS fabrication process. The two substrates are then bonded together to form a hybrid detector.
Document ID
20080004649
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Wadsworth, Mark
Atlas, Gene
Date Acquired
August 24, 2013
Publication Date
October 16, 2001
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-6,303,923
Patent Application
US-PATENT-APPL-SN-437328
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