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Microscale out-of-plane anemometerA microscale out-of-plane thermal sensor. A resistive heater is suspended over a substrate by supports raised with respect to the substrate to provide a clearance underneath the resistive heater for fluid flow. A preferred fabrication process for the thermal sensor uses surface micromachining and a three-dimensional assembly to raise the supports and lift the resistive heater over the substrate.
Document ID
20080005067
Acquisition Source
Goddard Space Flight Center
Document Type
Other - Patent
Authors
Liu, Chang
Chen, Jack
Date Acquired
August 24, 2013
Publication Date
August 2, 2005
Subject Category
Instrumentation And Photography
Funding Number(s)
CONTRACT_GRANT: NAG5-8781
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-6,923,054
Patent Application
US-PATENT-APPL-SN-346565

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