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Carbon nanotube growth density controlMethod and system for combined coarse scale control and fine scale control of growth density of a carbon nanotube (CNT) array on a substrate, using a selected electrical field adjacent to a substrate surface for coarse scale density control (by one or more orders of magnitude) and a selected CNT growth temperature range for fine scale density control (by multiplicative factors of less than an order of magnitude) of CNT growth density. Two spaced apart regions on a substrate may have different CNT growth densities and/or may use different feed gases for CNT growth.
Document ID
20100024444
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Delzeit, Lance D.
Schipper, John F.
Date Acquired
August 24, 2013
Publication Date
April 27, 2010
Subject Category
Nonmetallic Materials
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-7,704,547
Patent Application
US-Patent-Appl-SN-11/472,516

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